Axcelis Ships 8MeV Ion Implanter to "Leading CIS Manufacturer in China"

Image Sensors World        Go to the original article...

PRNewswire:  Axcelis has shipped an 8MeV Purion VXE high energy ion implantation system to a "leading CMOS image sensor manufacturer located in China." This is the first Purion VXE shipped to this chipmaker.

EVP of Product Development, Bill Bintz, commented, "The Purion VXE was designed to address the specific needs of customers developing and manufacturing the most advanced CMOS image sensors. To optimize both performance and yield, these emerging image sensor devices require ultra-high energy implants with extremely precise and deep implant profiles, concurrent with ultra-low metal contamination levels. Building off of Axcelis' market leading LINAC technology, the Purion VXE uniquely addresses these customer needs."

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